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- TDS
- What is TDS
TDS
What is TDS
Introduction
"TDS "是一种升温解吸分析仪，是一种通过提高样品的温度来测量和分析从样品表面解吸的气体的设备。
它可以提供每个分子结合能的准确信息。
利用这项技术，可以了解超高真空零站中气体的变化和组成，直至最小量，并可定性和定量地测量其随温度和时间的变化。
在各种分析技术中，它的灵敏度最高，而且不含化学物质，性能稳定。
What is TDS?
"TDS "是一种通过提高样品温度来测量和分析样品表面放气现象的设备，用于定性和定量分析加工过程中出现的放气现象，以便主动分析和预防其产生的原因"。
Why TDS?
Simple Idea : Adsorbed particles with different binding energies will desorb at different temperature.
Applications
- - 半导体、显示器材料分析
- - 汽车、钢铁材料氢气分析
- - 超纯材料，超痕量分析
基于升温的出气率检测技术通常采用 TDS 方法，但迄今为止，用于实时测量晶圆杂质分布图的局部定向和方向定向的诊断技术尚未建立，也没有一种系统可以同时进行定性和定量分析。我们提供的 TDS 系统克服了这些缺点。
Performance Comparisions
与其他公司相比，IVT 的 TDS 在 Calibration, Heating, Pumping Speed 等方面具有很强的竞争力。我们还根据您的应用提供用户友好型 DAQ 软件。
| fTDS(Fusion)&TVGA | IVT sTDS(smal) | mTDS(moduated) | Company A | Company B | tTDS(throughput) | |
|---|---|---|---|---|---|---|
| Measurement Method | Throughtput⑴ mapping capability | Throughtput⑴ | Modulation⑴ | QMS signal⑵ | QMS signal⑵ | Throughtput⑴ |
| Calibration | O: direct KRISS measurement traceability | O: direct KRISS measurement traceability | O: direct KRISS measurement traceability | Δ indirect traceability, standard sample required | Δ indirect traceability, standard sample required | O: direct NMI measurement traceability |
| Sample | 300mm wafer, Ø60mm | Ø20mm Sample | Ø20mm Sample | Ø10mm Sample | Ø10mm Sample | Ø10mm Sample |
| Heater | Beam heater Lamp heater | IR rod heater | IR rod heater | IR rod heater | Furnace : PID Difficult | IR rod heater |
| Hydrogen Pumping Speedr | Method 1 : not enough calibration only Method 2 : enough | Method 1 : not enough calibration only Method 2 : enough | Variable : dependent on the Position of the Orifice Plunger | Enough | Not enough : buffer zone (two TMPs Required) | Not enough : fixed orifice constraint |
| AnyMolecule, X | Easy : direct measurement | Easy : direct measurement | Difficult | Indefinite Traceability QMS Dependent Signal | Indefinite Traceability, QMS Dependent Signal | Modification required |
| Atomic Mass | 200 | 200 | 200 | 200 | 200 | 200 |
| Uncerainty | 18.0%(BPG 400 IG) | 4.8% or 18.0% | Conductance Dependent | Unknown | Unknown | 4.8% (370 Stavil IG) |
| DAQ Software | Real Time | Real Time (user specitied) | Not Real Time | Real Time | Real Time | Real Time |
| Maintenance | Easy | Easy | Easy | Very Difficult | Very Difficult | Easy |
| Competitiveness | Most Competitive | Highly Competitive | Competitive | Highly Competitive | Very Competitive | Very Competitive |
(1) P.A.Redhead, “Recommended practices for measuring and reporting outgassing data”, J.Vac.Sci. Technol.A 20(5). Sep/Oct 2002
(2) US 5,528,032(June18,1996) - Thermal Desorption Gas Spectrometer, ESCO Ltd.