EN
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- TDS
- sTDS
TDS
sTDS
sTDS (Thermal Desorption Spectroscopy for Steel and materials of small samples)
In advanced process sites that include steel metal materials, there is a demand for differentiated technology for the qualitative and quantitative analysis of hydrogen using vacuum technology. The technology is suitable for small samples measuring 20 mm × 20 mm × 3 mm or less, capable of analysis in high-temperature regions around 1,400 ℃, within an ultra-high vacuum environment of less than 5 × 10^-10 mbar.
Specification
· Sample Description : up to 20 mm × 20 mm × 3 mm
· Mass Range : (1 ~ 200) amu
· IR Rod Heating : up to 1,400 ℃
· Base Pressure : *process chamber, < 2 × 10-9 mbar / *measurement chamber, < 1 × 10-9 mbar
· DAQ System : manual or automated fully, sample loading to measurement through data analysis
Applications
- - Metallurgy
- - Semiconductor
- - Thin Film
- - Glass
- - Research & Development