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Vacuum Deposition Systems

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Vacuum Deposition Systems

IVT has deposition and heating system technology applying various heat sources under high
vacuum and ultra - high vacuum environment.

  • E-beam Evaporation System

  • · Single/Multi Pocket E-Beam source with Water Cooled Crucible (4 cc up to 75 cc) with individual shutter
  • · High Voltage Power Supply (3 kW to 15 kW)
  • · X-Y Beam Sweep & Controller
  • · 4" Diameter View Port on Front Door With Manual Shutter
  • DC Magnetron Sputter

  • · Available in single & multi sputter sources with water cooling system.
  • · Available in high voltage power supply (3 kW ~ 10 kW)
  • · Substrate Rotation & Heating (100 ℃ up to 400 ℃)
  • · Source size from 3" to 8", User defined source size available.
  • Vacuum Furnace

  • · Working Temperature : 500 ℃ ~ 2,300 ℃
  • · Working Zone : 300 mm3 ~ 500 mm3
  • · Chamber Shape : cylinderical, rectangular, spherical
  • · Heater : sheath, super kantal, halogen, graphite
  • · Atmosphere : vacuum, ar
  • · Auto Vent & Radiation Thermometer
IVT