Vacuum Deposition Systems
IVT has deposition and heating system technology applying various heat sources under high
vacuum and ultra - high vacuum environment.
E-beam Evaporation System
- ¡¤ Single/Multi Pocket E-Beam source with Water Cooled Crucible
(4 cc up to 75 cc) with individual shutter
- ¡¤ High Voltage Power Supply (3 kW to 15 kW)
- ¡¤ X-Y Beam Sweep & Controller
- ¡¤ 4" Diameter View Port on Front Door With Manual Shutter
DC Magnetron Sputter
- ¡¤ Available in single & multi sputter sources with water
cooling system.
- ¡¤ Available in high voltage power supply (3 kW ~ 10 kW)
- ¡¤ Substrate Rotation & Heating (100 ¡É up to 400 ¡É)
- ¡¤ Source size from 3" to 8", User defined source
size available.
Vacuum Furnace
- ¡¤ Working Temperature : 500 ¡É ~ 2,300 ¡É
- ¡¤ Working Zone : 300 mm3 ~ 500 mm3
- ¡¤ Chamber Shape : cylinderical, rectangular, spherical
- ¡¤ Heater : sheath, super kantal, halogen, graphite
- ¡¤ Atmosphere : vacuum, ar
- ¡¤ Auto Vent & Radiation Thermometer