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fTDS

TDS(Thermal Desorption Spectroscopy for Special Application)

其他因特殊用途而制造的TDS设备，根据外部机构的分析委托，提供定性 + 定量分析的试验报告。
- Complex TDS
- SRM in distance, sample in large chamber TDS
- Varied sample features, user specified TDS in demand

▶ Specification
Complex TDS
· Sample Description: up to Ø20 mm × 50 mm
· Mass Range: (1 ~ 200) amu
· IR Rod Heating: up to 800 ℃
· Base Pressure:
* process chamber, < 5 × 10^-8 mbar
· DAQ System: manual, sample loading to measurement through data analysis

▶ Specification
User defined TDS
· Sample Description: up to Ø30 mm × 50 mm
· Mass Range: (1 ~ 200) amu
· IR Heating: up to 900 ℃
· Base Pressure:
* process chamber, < 2 × 10^-9 mbar
* measurement chamber, < 1 × 10^-9 mbar
· DAQ System: manual, sample loading to measurement through data analysis
· System Design: user specified requirements

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