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TDS (Thermal Desorption Spectroscopy)

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Introduction

Thermal Desorption Spectroscopy (TDS)訝삭쫨뵪雅롨렩孃쀥뀽雅롥릢늽耶먨뭽렅耶먪쉪瀯볟릦꺗岳→겘귚슴뵪쐿令븃▼뭽兀③뇧늽옄餓,늽옄쑉쐿令뷴램葉뗤릎雅㎫뵟쉪麗붶퐪쉪뇧뭽닇늽귛닶뵪瑥ζ쑐룾餓η‘溫ㅷ쐿令븃즳營냵엨孃뇧麗붶퐪뇧쉪룜뙑뭽麗붶퐪瀯꾣닇, 룾餓ζ탩뇧릢歷⒴벧곫뿶뿴쉪룜뙑, 쐣뒰雅롦룓遙섊뵟雅㎪㎩뭽윥삇뿮窯섊쉪렅썱嶺됥귛쑉늽옄쑐訝꽏佯也, 鵝욜뵪兀③뇧늽옄餓ゆ뿶룾늽옄쐣麗붶퐪쉪瀯꾣닇

What is TDS?

TDS삸뵪雅롦탩뇧뭽늽옄룓遙섉졆뱚쉪歷⒴벧뿶餓롦졆뱚쉪烏③씊꽦獵사쉪麗붶퐪쉪獒끿쉰 뵪雅롩싪퓝野밧램葉뗤릎雅㎫뵟쉪붂눣麗붶퐪瓦쏂죱若싨㎯곩츣뇧늽옄, 雅뗥뎺늽옄뭽窯꾦삻렅썱

Quantitative Analysis

Quadrupole Mass Spectrometer

Applications

  • - 뜇野쇌퐪, 샑鹽뷴솳쓲뼑늽옄
  • - 黎썼쉐, 뮖뱚쓲뼑麗℡늽옄
  • - 擁끿변쓲뼑, 엨孃뇧늽옄

쉹歷⒴벧쉪뜃遙, 訝띸변돥(Outgassing rate)汝윥力뺜닾鵝욜뵪TDS뼶力, 掠깿엹곫뼶릲엹쇂쐠若욄뿶訝띸변돥 삝弱꾣탩뇧瑥딀뼪力뺠눛餓듾맏閭瓦섉쑋솹룋, 阿잍깹쐣룾릪뿶瓦쏂죱若싨㎩늽옄뭽若싮뇧늽옄쉪楹사퍨 쑍뀶뤈룾堊쎾틪뀑쐨瓦쇾틳煐븀궧쉪TDS楹사퍨

Performance Comparisions

IVT쉪TDS訝랢alibration갎eating갥umping Speed嶺됧끀餓뽩뀶뤈쎑驪, 끁쐣遙섇벧쉪塋욂틝뒟 閭ㅵ쨼, 졊뜮佯붺뵪窯녶윜, 룾룓堊쎽씩雅롧뵪댎鵝욜뵪쉪DAQ饔餓뜰

DAQ S/W

(젶)IVT