Products

TDS
(Thermal Desorption Spectroscope)

瓦묈ㄷ鸚싨빊쉪뜇野쇌퐪藥η쮮쑉쐿令뷰릎瓦쏂죱, 野밥틢藥η쮮訝눣렟쉪凉귛만렟穩, 若욇솀訝딃씆躍면슻餓ε늽옄 썱閭, 訝뷰틙싪퓝野밧램葉뗤릎눣렟쉪outgas瓦쏂죱若싨/若싮뇧쉪늽옄, 餓δ씩雅뗥뎺늽옄뭽窯꾦삻訝띹돬렅썱, 誤곮쩣DS(Thermal Desorption Spectroscopy)役뗩뇧獒끿쉰

WLIMS
(Wafer-Level Impurity Mapping System)

訝롥렅쐣쉪VPD-ICP-MS닑TXRF訝졆, 뿞遙섆뻔쉪늽옄楹사퍨阿잌룾餓ζ샑렟쎑鴉쇘쉪꽏佯, 誤곫콆弱묊쉪뎺鸚꾤릤, 삸룾쑉뜇野쇌퐪뵟雅쬵ine訝딂퓵烏똮n-line monitoring쉪寧т訝ょ내瀯잆

Ceramic pebbles
렅쐣쉪쇂벜릡뵟雅㎪뼶凉뤷룛댆릡쉪鸚㎩컦뭽凉귞돥쉪雅㎫뵟嶺됬쉪댍瀛, 耶섇쑉슻餓ε틪뵪雅롥닶뵪봻뮎麗㎩뙑돥쉪졇엻릦굢뵪罌욅뵟쓲뼑쉪뵟雅㎪뼶凉뤹쉪掠솏귡봻뮎麗㎩뙑돥(Li2TiO3)熬ョ뵪鵝쒏졇엻릦굢뵪擁낂뇥麗℡쥭뵟쓲뼑귝쑍뀶뤈藥꿨룕눣驪뤷뭅룾餓ι뇧雅50럮餓δ툓쉪댍좂내瀯잆

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